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3D Optical Surface Profilometer SuperView W1-Non-contact Surface Roughness Measurement System-Precision Metrology Supplier

12 Jan 2026
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Model No.: SuperView W1/W1-Pro
Product name: Nano 3D Optical Surface Profilometers
Standard field of view: (0.98*0.98)mm
Max field of view: (6x6)mm
Reflectivity of test object: 0.5 % ~100 %
Repeatability of Roughness RMS: 0.005nm
Scanning range: ≤10mm Resolution: 0.1nm
Accuracy of stage measurement: 0.3 %
Repeatability of stage measurement: 0.08% 1σ

Description

SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image. The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.

Parameters

Model No.		SuperView W1	SuperView W1-Pro
Light source		White LED
Video system		1024×1024
Standard Field of View		0.98×0.98 mm
Max Field of View		6.0×6.0 mm(Optional)
Lens Turret		Manual 3 holes turret(Optional: Motaorized 5 holes turret)
XY Object table	Size	320×200mm	300×300mm
	Moving range	140×100mm	200×200mm
	Loading capacity	10kg
	Control method	Motorized
Tilt		±5°
Z Axis	Tracvel range	100mm
	Control method	Motorized
Z Stroke Scanning range		10mm
Surface Form Repeaability*2		0.1nm
Roughness RMS Repeatability*3		0.005nm
Step Hiehgt Measurementy*4		Accuracy: 0.3% Repeatability: 0.008%(1σ)
Scanning Speed at 0.1nm resulution		1.85μm/s
Reflectivity of Test Object		0.05%~100%
Size(LWH)		700x606x920mm
Weight		<160kg
Operating Environment	Temperature	15°C~30°C, fuctuation <1°C/15min
	Humidity	5%~95% RH, no condensation
	Vibration	VC-C or better
	Software Noise Evaluation*5	3σ≤4nm
	Compressed Air	0.6Mpa oil-free, water-free, 6mm diameter of hose
	Power Supply	AC100~240V, 50/60Hz, 4A, 300W
	Other	No strong magnetic field, No corrosive gas
1 W1 is the standard model of 3D Optical Surface Profilometer; W1-pro has larger stage size and travel range. W1-Ultra has greatly improved the scanning speed compared to W1. 2 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view 3 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178. 4 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000 *5 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%; When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site.