3D Optical Surface Profilometer SuperView W1-(Duplicate from previous batch)-Non-contact Surface Metrology-Precision Instruments Supplier
- Model No.: SuperView W1/W1-Pro
Product name: Nano 3D Optical Surface Profilometers
Standard field of view: (0.98*0.98)mm
Max field of view: (6x6)mm
Reflectivity of test object: 0.5 % ~100 %
Repeatability of Roughness RMS: 0.005nm
Scanning range: ≤10mm Resolution: 0.1nm
Accuracy of stage measurement: 0.3 %
Repeatability of stage measurement: 0.08% 1σ
Description
SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image. The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.
Parameters
| Model No. | SuperView W1 | SuperView W1-Pro | |
| Light source | White LED | ||
| Video system | 1024×1024 | ||
| Standard Field of View | 0.98×0.98 mm | ||
| Max Field of View | 6.0×6.0 mm(Optional) | ||
| Lens Turret | Manual 3 holes turret(Optional: Motaorized 5 holes turret) | ||
| XY Object table | Size | 320×200mm | 300×300mm |
| Moving range | 140×100mm | 200×200mm | |
| Loading capacity | 10kg | ||
| Control method | Motorized | ||
| Tilt | ±5° | ||
| Z Axis | Tracvel range | 100mm | |
| Control method | Motorized | ||
| Z Stroke Scanning range | 10mm | ||
| Surface Form Repeaability*2 | 0.1nm | ||
| Roughness RMS Repeatability*3 | 0.005nm | ||
| Step Hiehgt Measurementy*4 | Accuracy: 0.3% Repeatability: 0.008%(1σ) | ||
| Scanning Speed at 0.1nm resulution | 1.85μm/s | ||
| Reflectivity of Test Object | 0.05%~100% | ||
| Size(L*W*H) | 700x606x920mm | ||
| Weight | <160kg | ||
| Operating Environment | Temperature | 15°C~30°C, fuctuation <1°C/15min | |
| Humidity | 5%~95% RH, no condensation | ||
| Vibration | VC-C or better | ||
| Software Noise Evaluation*5 | 3σ≤4nm | ||
| Compressed Air | 0.6Mpa oil-free, water-free, 6mm diameter of hose | ||
| Power Supply | AC100~240V, 50/60Hz, 4A, 300W | ||
| Other | No strong magnetic field, No corrosive gas | ||
| *1 W1 is the standard model of 3D Optical Surface Profilometer; W1-pro has larger stage size and travel range. W1-Ultra has greatly improved the scanning speed compared to W1. *2 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view *3 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178. *4 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000 *5 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%; When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site. | |||
Remark: Performance parameters are tested by using a 4.7μm precision master stage gauge in lab according to ISO 4287 and ISO 25178.
| Zoom ratio of lens | 2.5× | 5× | 10× | 20× | 50× | 100× | ||
| Numerical hole diameter | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | ||
| Optical resolution at 550nm (μm ) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 | ||

