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Upgraded Vertical Inline Sputter Coating Machine for TCO Film SIMVACO Thin Film Deposition PVD
SIMVACO’s vertical inline magnetron sputtering system is engineered to deliver high-transparency conductive films with superior efficiency and precision. With advanced features like high-throughput deposition and real-time process control, it is ideal for display manufacturing and flexible electronics applications.
Vertical Inline Magnetron Sputtering Technology
- High-Precision Vertical Deposition: Employs advanced vertical inline magnetron sputtering for uniform and efficient multilayer coatings essential for ITO and other conductive films.
- High Throughput Advantage: Optimized for industrial-scale production with a deposition cycle designed to achieve up to 20 m/min throughput, maximizing production efficiency.
- Material Versatility: Capable of sputtering materials like indium tin oxide (ITO), AZO, and conductive oxides to meet the exacting demands of the display industry.
- Process Stability: Real-time diagnostics and closed-loop control ensure consistent coating quality with minimal waste.
- Scalability for Large Substrates: Customizable for large glass or polymer substrates, accommodating diverse production scales.
Technical Specifications
| Parameter | Specification |
|---|---|
| Deposition Technology | Vertical Inline Magnetron Sputtering |
| Substrate Type | Glass panels, polymer films |
| Vacuum Pressure | ≤1×10^-4 Pa |
| Coating Uniformity | ±1% |
| Film Thickness Range | 10nm - 500nm |
| Deposition Speed | Up to 6nm/s |
| Substrate Size | Customizable for large-area applications |
| Automation | Fully automated with intelligent control |
| Throughput Speed | Adjustable, supporting up to 20 m/min |
| Material Options | ITO, AZO, other conductive oxides |
Inline Production for Continuous Operation
- Seamless Vertical Coating: Continuous vertical movement ensures uniform coating deposition across large substrates.
- Integrated Diagnostics: Real-time monitoring of deposition parameters such as plasma density and material flow rates.
- Modular Configuration: Expandable chambers and flexible design allow customization for specialized applications.
- Energy Efficiency: Low-energy vacuum and power systems ensure reduced operational costs.
Applications
- Display Panels: Transparent conductive films for high-resolution LCD and OLED screens, improving optical clarity and touch sensitivity.
- Touchscreens: Thin films that enhance durability and conductivity for various touchscreen devices.
- Foldable Displays: Flexible coatings optimized for foldable electronic devices requiring robust yet pliable layers.
- Wearable Electronics: Advanced conductive coatings designed for lightweight and flexible smart wearables.
Advantages
- Enhanced Production Capacity: High-speed deposition supports continuous manufacturing with shorter production cycles.
- Uniform Film Quality: Maintains precise film thickness and conductivity for multilayer coatings.
- Wide Material Compatibility: Suitable for ITO, AZO, and other advanced oxides.
- Integrated Stability Controls: Ensures stable, repeatable processes across production runs.
- Customizable for Scale: Adaptable design meets the requirements of various industrial applications.
Why Partner with SIMVACO?
SIMVACO provides innovative sputtering solutions tailored to meet the high standards of display and electronics industries. Our systems are optimized for precision, scalability, and efficiency.
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